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Ion Implantation: Equipment and Techniques Proceedings of the Fourth International Conference Berchtesgaden, Fed. Rep. of Germany, September 13–17, 1982
Author
Title
Ion Implantation: Equipment and Techniques [electronic resource] : Proceedings of the Fourth International Conference Berchtesgaden, Fed. Rep. of Germany, September 13–17, 1982 / edited by Heiner Ryssel, Hans Glawischnig.
ISBN
9783642691560
Published
Berlin, Heidelberg : Springer Berlin Heidelberg, 1983.
Physical Description
1 online resource.
Local Notes
Access is available to the Yale community.
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Access restricted by licensing agreement.
Variant and related titles
Springer ebooks.
Other formats
Printed edition:
Format
Books / Online
Language
English
Added to Catalog
February 05, 2013
Series
Springer Series in Electrophysics, 11
Subjects
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