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Handbook of vacuum science and technology
Title
Handbook of vacuum science and technology [electronic resource] / edited by Dorothy M. Hoffman, Bawa Singh, John H. Thomas, III.
ISBN
9780123520654
0123520657 (alk. paper)
Published
San Diego, CA : Academic Press, c1998.
Physical Description
xxii, 835 p. : ill.
Local Notes
Access is available to the Yale community.
Notes
Electronic reproduction. Palo Alto, Calif. : ebrary, 2009. Available via World Wide Web. Access may be limited to ebrary affiliated libraries.
Access and use
Access restricted by licensing agreement.
Format
Books / Online
Language
English
Added to Catalog
January 03, 2017
Bibliography
Includes bibliographical references and index.
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