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Laser applications in microelectronic and optoelectronic manufacturing V : 24-26 January, 2000, San Jose, USA
Title
Laser applications in microelectronic and optoelectronic manufacturing V : 24-26 January, 2000, San Jose, USA / Henry Helvajian [and others], chairs/editors ; sponsored by AFOSR--U.S. Air Force Office of Scientific Research [and] SPIE--the International Society for Optical Engineering.
ISBN
0819435503
9780819435507
Published
Bellingham, Wash. : SPIE, ©2000.
Physical Description
1 online resource (xi, 514 pages) : illustrations
Local Notes
Access is available to the Yale community.
Notes
English.
Access and use
Access restricted by licensing agreement.
Variant and related titles
SPIE digital library. OCLC KB.
Other formats
Print version: Laser applications in microelectronic and optoelectronic manufacturing V. Bellingham, Wash. : SPIE, ©2000
Format
Books / Online
Language
English
Added to Catalog
October 30, 2023
Series
Proceedings of SPIE ; v. 3933
Bibliography
Includes bibliographical references and author index.
Subjects
Genre/Form
Conference papers and proceedings
Also listed under
United States. Air Force. Office of Scientific Research.
Society of Photo-Optical Instrumentation Engineers.
Bookmark As
Citation
