Books+ Search Results
Micromachining and microfabrication : 28-30 November 2000, Singapore
Title
Micromachining and microfabrication : 28-30 November 2000, Singapore / Kevin Chau, Ash M. Parameswaran, Francis E.H. Tay, chairs/editors ; sponsored by Nanyang Technological University (Singapore) [and] SPIE--the International Society for Optical Engineering ; cooperating organizations, Institute of Physics (Singapore) [and others].
ISBN
0819439029
9780819439024
Published
Bellingham, Wash., USA : SPIE, ©2000.
Physical Description
1 online resource (vii, 248 pages) : illustrations
Local Notes
Access is available to the Yale community.
Notes
Electronic reproduction. Bellingham, Wash. : SPIE--the International Society for Optical Engineering, 2003. Mode of access: World Wide Web. Access restricted to SPIE Digital Library subscribers.
English.
Access and use
Access restricted by licensing agreement.
Variant and related titles
SPIE digital library. OCLC KB.
Other formats
Also available in print.
Original
Format
Books / Online
Language
English
Added to Catalog
October 30, 2023
Series
SPIE proceedings series ; v. 4230
Bibliography
Includes bibliographical references and index.
Subjects
Genre/Form
Conference papers and proceedings
Also listed under
Society of Photo-Optical Instrumentation Engineers.
Nanyang Technological University.
Institute of Physics, Singapore.
SPIE Digital Library.
Bookmark As
Citation
