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Micromachined devices and components V : 20-21 September 1999, Santa Clara, California
Title
Micromachined devices and components V : 20-21 September 1999, Santa Clara, California / Patrick J. French, Eric Peeters, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SolidState Technology [and others].
ISBN
0819434736
9780819434739
Published
Bellingham, Wash., USA : SPIE, ©1999.
Physical Description
1 online resource (ix, 304 pages) : illustrations
Local Notes
Access is available to the Yale community.
Notes
Electronic reproduction. Bellingham, Wash. : SPIE--the International Society for Optical Engineering, 2003. Mode of access: World Wide Web. Access restricted to SPIE Digital Library subscribers.
English.
Access and use
Access restricted by licensing agreement.
Variant and related titles
Micromachined devices and components 5
Micromachined devices and components five
SPIE digital library. OCLC KB.
Other formats
Also available in print.
Original
Format
Books / Online
Language
English
Added to Catalog
October 30, 2023
Series
SPIE proceedings series ; v. 3876
Bibliography
Includes bibliographical references and index.
Subjects
Genre/Form
Conference papers and proceedings
Also listed under
Society of Photo-Optical Instrumentation Engineers.
Solid State Technology (Organization)
SPIE Digital Library.
Bookmark As
Citation
