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Optical characterization techniques for high-performance microelectronic device manufacturing III : 16-17 October 1996, Austin, Texas
Title
Optical characterization techniques for high-performance microelectronic device manufacturing III : 16-17 October 1996, Austin, Texas / Damon DeBusk, Ray T. Chen, chairs/editors ; sponsored and published by SPIE--The International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International [and others].
ISBN
0819422754
9780819422750
Published
Bellingham, Wash. : SPIE, ©1996.
Physical Description
1 online resource (ix, 218 pages) : illustrations
Local Notes
Access is available to the Yale community.
Notes
Electronic reproduction. Bellingham, Wash. : SPIE--the International Society for Optical Engineering, 2005. Mode of access: World Wide Web. Access restricted to SPIE Digital Library subscribers.
Access and use
Access restricted by licensing agreement.
Variant and related titles
SPIE digital library. OCLC KB.
Other formats
Also issued in print.
Original
Format
Books / Online
Language
English
Added to Catalog
December 04, 2023
Series
SPIE proceedings series, v. 2877
Bibliography
Includes bibliographical references and index.
Subjects
Genre/Form
Conference papers and proceedings.
Also listed under
Society of Photo-optical Instrumentation Engineers.
Semiconductor Equipment and Materials International.
SPIE Digital Library.
Bookmark As
Citation
