Books+ Search Results
Advanced Processing of Semiconductor Devices II : 17-18 March 1988, Newport Beach, California
Title
Advanced Processing of Semiconductor Devices II : 17-18 March 1988, Newport Beach, California / Harold G. Craighead, J. Narayan, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organization, the Metallurgical Society.
ISBN
0892529806
9780892529803
Published
Bellingham, Wash., USA : SPIE, ©1988.
Physical Description
1 online resource (viii, 164 pages) : illustrations.
Local Notes
Access is available to the Yale community.
Notes
Electronic reproduction. [S.l.] : HathiTrust Digital Library, 2010.
Access and use
Access restricted by licensing agreement.
Variant and related titles
SPIE digital library. OCLC KB.
Other formats
Print version: Advanced Processing of Semiconductor Devices II. Bellingham, Wash., USA : SPIE, ©1988
Format
Books / Online
Language
English
Added to Catalog
December 04, 2023
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 945
Bibliography
Includes bibliographical references and indexes.
Subjects
Genre/Form
Conference papers and proceedings
Also listed under
Society of Photo-Optical Instrumentation Engineers.
Metallurgical Society (U.S.)
Bookmark As
Citation
