9781615837335

1615837337

9780819481030

0819481033

0819401307

9780819401304

SPIE Press monograph ; PM01

Preface

Chapter 1. Huygens' principle. 1.1. Light as a wave disturbance; 1.2. Wave propagation; References

Chapter 2. Fourier transforms. 2.1. Introduction; 2.2. Diffraction problems; 2.3. Conclusion

Chapter 3. Array theorem. 3.1. Introduction; 3.2. The array theorem; 3.3. Applications of array theorem; 3.4. Some examples; 3.5. Appendix: The convolution theorem; Reference

Chapter 4. Image formation: the impulse response. 4.1. Introduction; 4.2. Impulse response; 4.3. Image of a point object; 4.4. Conclusions; 4.5. Appendix: The relationship to geometrical optics

Chapter 5 Image formation in terms of the impulse response. 5.1. Introduction; 5.2. Impulse response for a cylindrical lens; 5.3. Image of a bar; 5.4. Image of two bars; 5.5. Image of three bars; 5.6. Experimental illustrations; Reference

Chapter 6. Resolution in terms of the impulse response. 6.1. Introduction; 6.2. Two-point resolution; 6.3. Image of two points: one dimensional; 6.4. Image of two points: two dimensional; 6.5. Conclusions

Chapter 7. Image formation: the transfer function. 7.1 Introduction; 7.2 Image of a cosinusoidal intensity distribution; 7.3 Periodic real object; 7.4 The transfer function and the aperture function; 7.5 Conclusion

Chapter 8. Image formation in terms of the transfer function. 8.1. Introduction; 8.2. The transfer function; 8.3. Image of a Ronchi ruling; 8.4. Defocused lens; 8.5. Appendix: Fourier transform of a Dirac comb.

Chapter 9. Fresnel diffraction. 9.1. Introduction; 9.2. Fresnel diffraction: near field; 9.3. Fresnel's integrals; 9.4. Fresnel diffraction by a rectangular aperture; 9.5. Fresnel diffraction by a straight edge; 9.6. Fresnel diffraction by a circular aperture

Chapter 10. Heuristic introduction to partially coherent light. 10.1. Introduction; 10.2. Partially coherent light; 10.3. Conclusions

Chapter 11. Elementary theory of optical coherence: Part I. 11.1. Introduction; 11.2. Elements of classical coherence theory; 11.3. Review of the theory of partial coherence; References

Chapter 12. Image formation with coherent light. 12.1. Introduction; 12.2. The measurement of intensity; 12.3. Addition of optical fields; 12.4. The imaging problem; 12.5. The amplitude impulse response; 12.6. The amplitude transfer function; 12.7. Conclusions; References

Chapter 13. Coherent imaging. resolution. 13.1. Introduction; 13.2. Image of a two-point object; 13.3. One-dimensional system; 13.4. Discussion: one-dimensional system; 13.5. Two-dimensional system; 13.6. Discussion: two-dimensional system; 13.7. Conclusions; References

Chapter 14. Coherent imaging: examples. 14.1. Introduction; 14.2. Image of an edge object; 14.3. Image of a slit object; 14.4. Reflected light imaging; 14.5. Conclusions; References.

Chapter 15. Coherence theory solution to the pinhole camera. 15.1. Introduction; 15.2. Pinhole camera with incoherent illumination; 15.3. Pinhole camera with coherent illumination; 15.4. Conclusions; 15.5. Appendix: Transfer function of the pinhole camera; References

Chapter 16. Diffraction and interference with partially coherent light. 16.1. Introduction; 16.2. Diffraction with partially coherent light; 16.3. One-dimensional apertures; 16.4. Two-dimensional apertures; 16.5. Multiple-beam interference with partially coherent light; 16.6. Analysis of a partially coherently illuminated array; References

Chapter 17. Elementary theory of optical coherence: Part II. 17.1. Examples of spatial coherence effects in optical instruments; References

Chapter 18. Elementary theory of optical coherence: Part III. 18.1. An empirical approach for use in optical instrument design; 18.2. Coherent imaging systems; 18.3. Temporal coherence considerations in optical system design; 18.4. Summary; References

Chapter 19. Selected criteria for image analysis. 19.1. Introduction; 19.2. Image formation; 19.3. Image quality criteria; 19.4. Discussion; References

Chapter 20. Photographic films. 20.1. Introduction; 20.2. Review of photographic films; 20.3. Appendix: derivation of the relationship between (S/N)D and (S/N)E; References.

Chapter 21. Sources of coherent noise and their reduction. 21.1. Introduction; 21.2. System noise considerations in coherent optical systems; 21.3. Speckle noise reduction techniques; 21.4. Design considerations for coherent optical systems; References.

Chapter 22. Division of wavefront interferometry. 22.1. Introduction; 22.2. Array theorem; 22.3. Examples of division of wavefront inerferometry; References.

Chapter 23. Division of amplitude interferometry. 23.1. Introduction; 23.2. General analysis; 23.3. Case I: Wavefront preserving interferometry for holograms; 23.4. Case II: Wavefront measuring interferometers; 23.5. Case III: Michelson interferometer with variable delay; 23.6. Case IV: Shearing interferometry; References

Chapter 24. Multiple-Beam Interference. 24.1. Introduction; 24.2. Analysis; 24.3. Visibility of the fringes of an N-beam interferometer; 24.4. Additional characteristics of multiple-beam interferometers; 24.5. Chromatic resolving power of a multiple-beam interferometer; 24.6. Fabry-Perot interferometry; References

Chapter 25. Introduction to holography. 25.1. Introduction; 25.2. Reconstruction of a two-beam interferogram; 25.3. Reconstruction of ideal two-beam interferograms; 25.4. Basic description of a two-beam hologram; 25.5. Formation and reconstruction of a Fourier transform hologram; 25.6. Other comments on Fourier transform holograms; 25.7. Types of holograms; 25.8. Simplified three-dimensional holography; 25.9. Fresnel and Fraunhofer holography; 25.10. Space bandwidth product of a Fresnel hologram; References.

Chapter 26. Holographic interferometry. 26.1. Introduction; 26.2. Basic objective and the advantages of holographic interferometry; 26.3. Types of holographic interferometry; 26.4. Simple holographic interferometer analysis; 26.5. Double-exposure holographic interferometry; 26.6. Differential or time-lapse double-exposure holographic interferometry; 26.7. Single-exposure (real-time) holographic interferometry; 26.8. Multiple-exposure or time-average holographic interferometry; 26.9. Multiple-wavelength holography for contouring; 26.10. Computer-generated holographic interferometry; 26.11. Conclusions; References

Chapter 27. Applications of holography. 27.1. Introduction; 27.2. Image formation; 27.3. Holographic optical elements; 27.4. Conclusions; 27.5. Appendix: Miscellaneous terminology; 27.6. Appendix: Interference microscopy; References

Chapter 28. Communication theory techniques in optics. 28.1. Introduction; 28.2. Sampling theorem; 28.3. Statistical description of random samples; References

Chapter 29. Analog optical computing: experimental Fourier analysis. 29.1. Introduction; 29.2. Optical Fourier transforms; 29.3. Slit aperture; 29.4. Periodic rectangular apertures; 29.5. Optical addition; 29.6. Optical convolution; 29.7. Optical spectrum replication by multiplication; 29.8. Appendix: Fourier transform of a rectangular wave; References.

Chapter 30. Analog optical computing: fourier synthesis utilizing amplitude filters. 30.1. Generalized optical system for fourier filtering; 30.2. Multiplication with binary filter functions; 30.3. Object replication as an example of multiplication with a periodic binary filter; 30.4. Optical subtraction by multiplication with a periodic amplitude filter; References

Chapter 31. Analog optical computing: Fourier synthesis utilizing amplitude and/or phase filters. 31.1. Optical division; 31.2. Case I: real filters; 31.3. Case II: purely imaginary inverse filters; 31.4. Case III: complex inverse filters; References

Chapter 32. Analog optical computing: additional mathematical operations. 32.1. Fresnel transform; 32.2. Mellin transform; 32.3. Differentiation and integration of optical signals; References

Chapter 33. Analog optical computing: optical correlation techniques. 33.1. Introduction; 33.2. Incoherent light correlation; 33.3. Coherent light correlation; 33.4. True one-dimensional, multichannel correlation system; References

Chapter 34. Optically modulated imagery. 34.1. Introduction; 34.2. The concept of carrier-modulated imaging; 34.3. Multiple image storage with angularly dependent carriers; 34.4. Encoding color images on black-and-white film; 34.5. Phase-modulated images; 34.6. The square-array-modulated image concept; 34.7. Image holography: three-dimensional image modulation; References.

Chapter 35. Phase contrast imaging. 35.1. Introduction; 35.2. Phase contrast viewing methods; 35.3. Phase visualization by defocus and Schlieren techniques: nonlinear methods; 35.4. Phase contrast imaging with extended linearity; 35.5. Conclusions; 35.6. Appendix: Imaging with an oblique illumination double-sideband phase contrast system; References

Chapter 36. Partially filled, synthetic aperture imaging systems: incoherent illumination. 36.1. Introduction; 36.2. Nonlinearities of partially filled synthetic apertures due to degree of coherence; 36.3. Aperture synthesis with incoherent illumination; 36.4. Appendix: Derivations of the alignment tolerances listed in Table 36.I for small segment dislocations; 36.5. Appendix: Formulation of the optical synthetic aperture analysis; References

Chapter 37. Partially filled, synthetic aperture imaging systems: coherent illumination. 37.1. Aperture synthesis with coherent illumination; 37.2. Measurement of F12 (0) with an optical synthetic aperture; 37.3. Super-resolving pupil functions; 37.4. Conclusions; References

Chapter 38. Parametric design of a conceptual high-resolution optical lithographic printer. 38.1. Introduction; 38.2. Background; 38.3. Proposed system and critical issues; 38.4. Optical subsystem considerations; 38.5. Exposure subsystem considerations; 38.6. Optical lens design considerations; 38.7. Focusing and alignment considerations; 38.8. Overview of the proposed system; 38.9. Conclusions; References

Index.