Title
Design and process integration for microelectronic manufacturing IV : 23-24 February, San Jose, California, USA / Alfred K.K. Wong, Vivek K. Singh, chairs/editors ; cooperating organization, SEMATECH, Inc (USA) ; sponsored and published by SPIE--the International Society for Optical Engineering.
Notes
Electronic reproduction. Bellingham, Wash. : SPIE--the International Society for Optical Engineering, 2006. Mode of access: World Wide Web. Access restricted to SPIE Digital Library subscribers.