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Handbook of vacuum science and technology
Title
Handbook of vacuum science and technology / edited by Dorothy M. Hoffman, Bawa Singh, John H. Thomas, III.
ISBN
0123520657 (alk. paper)
Published
San Diego, CA : Academic Press, c1998.
Physical Description
xxii, 835 p. : ill., photos ; 24 cm.
Format
Books
Language
English
Added to Catalog
June 01, 2002
Bibliography
Includes bibliographical references and index.
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