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UMI no 3030767

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  • Thesis : Yale University, Graduate School, Engineering and Applied Science1
  • UMI no 30307671
1.
Characterization of photoacid generation in chemically amplified photoresists using pH-sensitive fluorescence imaging
Author
Feke, Gilbert D.
Published
c2001.
Location
Library Shelving Facility (LSF) >> Film D11391
Format
Books / Dissertations & Theses / Microforms