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Subject: "Technology Periodicals."
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American Institute of Physics
Subject: Is
Is Is Not
Microelectronics

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Current results range from 1983 to 1991

1.
Journal of vacuum science & technology. B, Microelectronics processing and phenomena
Published
New York, N.Y. : by the American Institute of Physics for the AVS, ©1983-©1990.
Online
Full text
Location
Yale Internet Resource >> None
Format
Journals & Newspapers / Online
2.
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement, and phenomena
Published
Woodbury, N.Y. : Published for the American Vacuum Society by the American Institute of Physics
Online
Full text
Location
Yale Internet Resource >> None
Format
Journals & Newspapers / Online