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Subject: "Manufacturing processes"
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Design and construction

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Current results range from 1997 to 2003

1.
MEMS components and applications for industry, automobiles, aerospace, and communication II : 28-29 January 2003, San Jose, California, USA
Published
Bellingham, Wash., USA : SPIE, ©2003.
Online
Online book
Location
Yale Internet Resource >> None
Format
Books / Online
2.
In-line characterization techniques for performance and yield enhancement in microelectronic manufacturing : 1-2 October 1997, Austin, Texas
Published
Bellingham, Wash., USA : SPIE, ©1997.
Online
Online book
Location
Yale Internet Resource >> None
Format
Books / Online