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Subject: "Manufacturing processes."
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Society of Photo-optical Instrumentation Engineers
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Microelectronics industry

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Current results range from 1992 to 2001

1.
Laser applications in microelectronic and optoelectronic manufacturing VI : 22-24 January, 2001, San Jose, USA
Published
Bellingham, Wash., USA : SPIE, ©2001.
Online
Online book
Location
Yale Internet Resource >> None
Format
Books / Online
2.
Process module metrology, control, and clustering : 11-13 September 1991, San Jose, California
Published
Bellingham, Wash. : SPIE, ©1992.
Online
Online book
Location
Yale Internet Resource >> None
Format
Books / Online