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LEADER
01485nam a2200373 a 4500
001
5176089
005
20020514200231.0
007
heubmb024bbca
008
980519s1997 mdua bb f000 0 eng d
035
|a
(OCoLC)ocm39144713
035
|a
(GPO)97092843
035
|9
MAY5943YL
040
|d
GPO
|d
DLC
|d
MvI
|d
MvI
049
|a
gdcm
074
|a
0247-D (MF)
086
0
|a
C 13.58:6097
100
1
|a
Dickens, Brian.
245
0
0
|a
Photoacoustic infrared spectroscopy of thin polyimide layers on glass substrates
|h
[microform] /
|c
Brian Dickens ; sponsored by the NIST Office of Microelectronics Programs.
260
|a
[Gaithersburg, MD] :
|b
U.S. Department of Commerce, Technology Administration, National Institute of Standards and Technology,
|c
[1997]
300
|a
30, [19] p. :
|b
ill. ;
|c
28 cm.
440
0
|a
NISTIR ;
|v
6097
500
|a
Shipping list no.: 98-0577-M.
500
|a
"December 1997."
504
|a
Includes bibliographical references (p. 19-20).
533
|a
Microfiche.
|b
[Washington, D.C.] :
|c
Supt. of Docs., U.S. G.P.O.,
|d
[1998]
|e
1 microfiche : negative.
539
|a
s
|b
1998
|d
dcu
|e
n
|g
b
650
0
|a
Polyimides
|x
Spectra.
650
0
|a
Optoacoustic spectroscopy.
650
0
|a
Infrared spectroscopy.
710
2
|a
National Institute of Standards and Technology (U.S.)
902
|a
Sterling Memorial Library
|b
SML, Microform (Non-Circulating) >> C 13.58:6097|DELIM|5575911
907
|a
2002-06-01T00:00:00.000Z
928
|a
AC09262000
948
|a
Marcive