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Micromachining and microfabrication process technology XVIII : 5 and 7 February 2013, San Francisco, California, United States
Title
Micromachining and microfabrication process technology XVIII : 5 and 7 February 2013, San Francisco, California, United States / Mary Ann Maher, Paul J. Resnick, editors ; sponsored by SPIE ; cosponsored by VUZIX Corporation (United States) ; supported by Fraunhofer Institute for Photonic Microsystems (Germany).
ISBN
0819493813
9780819493811
Publication
Bellingham, Washington : SPIE, [2013]
Copyright Notice Date
©2013
Physical Description
1 online resource : illustrations (some color).
Local Notes
Access is available to the Yale community.
Access and use
Access restricted by licensing agreement.
Summary
Proceedings of SPIE offer access to the latest innovations in research and technology and are among the most cited references in patent literature.
Variant and related titles
Micromachining and microfabrication process technology 18
Micromachining and microfabrication process technology eighteen
SPIE digital library. OCLC KB.
Other formats
Print version: Micromachining and microfabrication process technology XVIII. Bellingham, Wash. : SPIE, [2013]
Format
Books / Online
Language
English
Added to Catalog
October 30, 2023
Series
Proceedings of SPIE, volume 8612
Bibliography
Includes bibliographical references.
Subjects
Genre/Form
Conference papers and proceedings
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