Micromachining and microfabrication process technology XVIII : 5 and 7 February 2013, San Francisco, California, United States
Title
Micromachining and microfabrication process technology XVIII : 5 and 7 February 2013, San Francisco, California, United States / Mary Ann Maher, Paul J. Resnick, editors ; sponsored by SPIE ; cosponsored by VUZIX Corporation (United States) ; supported by Fraunhofer Institute for Photonic Microsystems (Germany).