Books+ Search Results
Near-field optics for semiconductor process characterization
Author
Title
Near-field optics for semiconductor process characterization [microform] / by Scott J. Bukofsky.
Published
1998.
Physical Description
xvi, 112 leaves : ill. ; 29 cm.
Notes
Microfilm. Ann Arbor, Mich. : UMI, 1998. 1 microfilm reel ; 35 mm.
Format
Books / Dissertations & Theses / Microforms
Language
English
Added to Catalog
June 01, 2002
Thesis note
Thesis (Ph. D.)--Yale University, 1998.
Subjects (Local Yale)
Bookmark As
Citation
