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01169ctm a22003137a 4500
001
4255284
005
20110512115353.0
007
hd|afb---bacp
008
980604s1998 xx a a 000 0 eng d
035
|a
(OCoLC)ocn702852537
035
|9
FLS8891YL
035
|a
4255284
040
|a
CtY
|c
CtY
079
|a
ocn702554161
100
1
|a
Bukofsky, Scott J.
245
1
0
|a
Near-field optics for semiconductor process characterization
|h
[microform] /
|c
by Scott J. Bukofsky.
260
|c
1998.
300
|a
xvi, 112 leaves :
|b
ill. ;
|c
29 cm.
502
|a
Thesis (Ph. D.)--Yale University, 1998.
533
|a
Microfilm.
|b
Ann Arbor, Mich. :
|c
UMI,
|d
1998.
|e
1 microfilm reel ; 35 mm.
|7
s1998 miun a
690
4
|a
UMI no 9831399
690
4
|a
Thesis : Yale University, Graduate School, Engineering and Applied Science.
902
|a
Library Shelving Facility (LSF)
|b
Library Shelving Facility (LSF) >> Film D10743|DELIM|4632741
902
|a
Library Shelving Facility (LSF)
|b
Library Shelving Facility (LSF) >> Film D10743|DELIM|7660647
905
|a
bulldog
907
|a
2002-06-01T00:00:00.000Z
927
|a
20001211RO
928
|a
AC09262000
948
|a
HSS:stu,cbw