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Advanced processing of semiconductor devices : 23-25 March 1987, Bay Point, Florida
Title
Advanced processing of semiconductor devices : 23-25 March 1987, Bay Point, Florida / Sayan D. Mukherjee, editor ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating sponsor, the Metallurgical Society.
ISBN
089252832X
9780892528325
Published
Bellingham, Wash., USA : SPIE, ©1987.
Physical Description
1 online resource (x, 362 pages) : illustrations.
Local Notes
Access is available to the Yale community.
Notes
Electronic reproduction. [S.l.] : HathiTrust Digital Library, 2010.
Access and use
Access restricted by licensing agreement.
Variant and related titles
SPIE digital library.
Other formats
Print version: Advanced processing of semiconductor devices. Bellingham, Wash., USA : SPIE, ©1987
Format
Books / Online
Language
English
Added to Catalog
November 28, 2017
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 797
Bibliography
Includes bibliographical references.
Subjects
Also listed under
Society of Photo-optical Instrumentation Engineers.
Metallurgical Society (U.S.)
Bookmark As
Citation
