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Microfabrication for industrial applications
Author
Title
Microfabrication for industrial applications / Regina Luttge.
ISBN
9780815519775
081551977X
0815515820
9780815515821
Published
Oxford ; Waltham, MA : William Andrew, 2011.
Physical Description
1 online resource (xvii, 289 pages) : illustrations.
Local Notes
Access is available to the Yale community.
Access and use
Access restricted by licensing agreement.
Summary
This book focuses on the industrial perspective for micro- and nanofabrication methods including large-scale manufacturing, transfer of concepts from lab to factory, process tolerance, yield, robustness, and cost. It gives a history of miniaturization, micro- and nanofabrication, and surveys industrial fields of application, illustrating fabrication processes of relevant micro and nano devices. Concerning sub-micron feature manufacture, the book explains: the philosophy of micro/ nanofabrication for integrated circuit industry; thin film deposition; (waveguide, plastic, semiconductor) material processing; packaging; interconnects; stress (e.g., thin film residual); economic; and environmental aspects. Micro/nanomechanical sensors and actuators are explained in depth with information on applications, materials (incl. functional polymers), methods, testing, fabrication, integration, reliability, magnetic microstructures, etc.; Shows engineers & students how to evaluate the potential value of current and nearfuture manufacturing processes for miniaturized systems in industrial environments; Explains the top-down and bottom up approaches to nanotechnology, nanostructures fabricated with beams, nano imprinting methods, nanoparticle manufacturing (and their health aspects), nanofeature analysis, and connecting nano to micro to macro; Discusses issues for practical application cases; possibilities of dimension precision; large volume manufacturing of micro- & nanostructures (machines, materials, costs); Explains applications of Microsystems for information technology, e.g.: data recording (camera, microphone), storage (memories, CDs), communication; computing; and displays (beamers, LCD, TFT); Case studies are given for sensors, resonators, probes, transdermal medical systems, micro- pumps & valves, inkjets, DNA-analysis, lab-on-a-chip, & micro-cooling.
Variant and related titles
O'Reilly Safari. OCLC KB.
Format
Books / Online
Language
English
Added to Catalog
January 10, 2020
Series
Micro & nano technologies series
Bibliography
Includes bibliographical references and index.
Contents
Note continued: 3.3.6. Patterning Ceramic Materials at Nanoscale Resolution
3.4. Speciality Substrates
3.4.1. Silicon-on-Insulator (SOI)
3.4.2. Electro-Optic Substrates
3.5. Advanced Non-Silicon and Silicon Hybrid Devices
3.5.1. Nanofabrication of Information Storage Devices
3.5.2. Integrated Optics
3.6. Planar Lightwave Circuits
3.7. Fabrication Example of an Integrated Optical Device
3.8. Integrated Optics in the MST Foundry Service Industry: A Case Study
3.9. Conclusions
References
4.1. Top-Down, Bottom-Up
4.1.1. Nanolithography
4.1.2. Introduction to the Need for New Lithographic Techniques
4.1.3. Nanolithographic Techniques
4.1.4. Top-Down Nanolithographic Principles
4.1.5. Nanolithographic Technologies for the Microelectronics Industry
4.1.6. Nanoimprint Technology
4.1.7. Case Studies: Nanoimprint Applications
4.1.8. Emerging Nanolithographic Technologies
4.1.9. Nanolithography in R & D.
Note continued: 4.1.10. LIL Development at MESA+ NanoLab NL
4.1.11. Case Study: Laser Interference Lithography Nanoarrays for Cell Biology
4.1.12. Concluding Remarks on Emerging Nanolithography
4.2. Nanomaterials
4.2.1. Ordered Oxides
4.2.2. Oxide Nanoarrays: Definitions and Background
4.2.3. Principles of Oxide Nanoarray Fabrication
4.2.4. Ordered Oxides in Medical Applications
4.3. Where Are We9
4.4. Where to Go from Here?
References
5.1. Application Fields
5.2. Overview of Materials
5.2.1. Single Crystals
5.2.2. Amorphous Materials
5.3. Thick and Thin Film Hybrid Materials
5.4. Microactuation
5.5. Packaged Sensors
5.5.1. From Die to Device Level
5.5.2. From Device Level to System
5.6. Silicon as a Mechanical Material in Resonant Microdevices
5.6.1. Resonant Sensors
5.6.2. Diaphragms as Micromechanical Couplers
5.7. Information Society
5.7.1. Micro-Opto-Electromechanical Systems
5.8. Conclusions
References.
Note continued: 6.1. Application Field
6.2. Sensor Principles for the Collection of (Bio)Chemical Information
6.2.1. Optical Techniques
6.2.2. Electrochemical Techniques
6.2.3. Methodology of Sensor Development
6.3. Integrated chemFET Device: Case Study of a Semiconductor-Based pH Sensor Development
6.4. Integrated Clinical Diagnostics: A Medical Application for Electrochemical Sensor Arrays
6.4.1. From Microarray to Biochip Technology
6.4.2. Cell-Based Biosensor
6.5. Conclusions
References
7.1. Application Fields
7.2. Microfluidic Components
7.2.1. Passive Microvalves
7.2.2. Active Microvalves
7.3. Controlled Transport by Diffusion
7.4. Integration for Microfluidic Transport, Sensing and Dispensing
7.5. Lab-on-a-Chip
7.5.1. Miniaturized Particle and Cell Sorting Devices
7.5.2. Cell Cultures and Fermentation Processes on Chip
7.6. Device-to-World Connections: The MATAS Concept.
Note continued: 7.7. From the Lab Bench to Industry: Microchip Capillary Electrophoresis
7.7.1. Is There a Need for a Microfluidic-Integrated System at the Doctor's Surgery?
7.7.2. The Technology Behind the Lithium Case
7.7.3. Microchip Capillary Electrophoresis Instrumentation
7.7.4. Sample to Chip Interface
7.7.5. Samples
7.7.6. Results and Conclusions from the LICETAS Project
7.8. Conclusions
References
8.1. Microneedle Research at University of Twente and its Spin-Off
8.1.1. Desk Research: Microneedle Arrays, Microfabrication and Transdermal Delivery of Insulin
8.1.2. Is There a Need for Microneedles?
8.1.3. Microneedles by Microfabrication Technologies
8.1.4. Are Microneedles Ready for Insulin Delivery?
8.1.5. Design Aspects for Microneedle Insulin Delivery
8.2. MNA-4-Insulin: A Brief Evaluation
8.3. Conclusions
References
9.1. Environmental Aspects
9.2. Health Aspects of Nanoparticles
9.3. Conclusions
References.
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