A review of different types of photonic MEMS tunable lasers / A.Q. Liu [and others]
Development of a 1x2 piezoelectric optical fiber switch / M. Leung [and others]
An active interconnecting mechanism for free-space optic applications / Ping Zhang [and others]
Experimental study on roughness and flatness of micromirror fabricated by different anisotropic silicon etching processes / Jing Xu [and others]
Optical MEMS devices based on micromachined torsion structure / Yaming Wu [and others]
Manufacturing and testing of the line-array fiber optic image slicer based on silicon V-grooves / Jingqiu Liang [and others]
Proposal and investigation for a planar MOEMS 1x8 wavelength-selective switch / Xiaoqi Li [and others]
High-speed and large-scale electromagnetically actuated MEMS scanning-mirror / Canjun Mu, Feiling Zhang, and Yaming Wu
Large distance liquid pumping by AC electro-osmosis for the delivery of biological cells and reagents in microfluidic devices / Daniel Lee [and others]
Rapid and simple half-quantitative measurement alpha-fetoprotein by poly(dimethylsiloxane) microfluidic chip immunochromatographic assay / Chao Tong, Qinghui Jin, and Jianlong Zhao
Amperometric immunosensor using electric field to improve the interaction between antibody and antigen / Jizhou Sun [and others]
MEMS-based uncooled infrared bolometer arrays: a review / Frank Niklaus, Christian Vieider, and Henrik Jakobsen
Contrastive study on the mechanical performance of MEMS microsprings fabricated by LIGA and UV-LIGA technology / Hua Li and Gengchen Shi
Calibration of computer vision positioning system for MEMS wire bonder / Junlan Li [and others]
A micro-electromechanical system design and manufacture considering fabrication error / Hua Li and Gengchen Shi
Investigation of charge accumulation in the dielectric for robust RF MEMS switches / Xuyuan Chen [and others]
New developments on polymer-based MEMS phase shifters / Jianqun Wang [and others]
Influence of ion implantation on dielectric charging in capacitive RF MEMS switches / Gang Li [and others]
Actuation voltage wave-form dependence of charge accumulation in RF MEMS switches / Haisheng San [and others]
Integrated microsensors and systems / Shanhong Xia [and others]
Research and fabrication of harmonic oscillator with high-quality in Si-based MOEMS acceleration seismic geophone / Zhengrong Tong [and others]
A silicon micromachined infrared emitter based on SOI waf / Haisheng San [and others]
A laser-induced fluorescence optical fiber detection system for micro-fluidic chip / Hong Wang and Yu Tang
Micro amperometric immunosensor by antibody immobilizing with electropolymerized protein A / Chao Bian [and others]
Optical fiber accelerometer based on MEMS torsional micromirror / Fanlin Zeng [and others]
A novel optical MEMS pressure sensor with a mesa diaphragm / Yixian Ge [and others]
Characterizations of microcantilever chemical sensors based on SOI material / Fangrong Hu [and others]
Study on the image processing algorithms for optical readout based uncooled MEMS IR imager systems / Li-quan Dong [and others]
Research of the digital coding mask based on digital micromirror device / Bai Lu [and others]
Fabrication of wall array by electrochemical etching of n-type silicon / Zhigang Zhao [and others]
Piezoelectric capacitive power generator from vibration energy / Yangjian Zhang [and others]
Charge accumulation in composite dielectric layers in capacitive RF MEMS switches / Linxian Zhan [and others]
MEMS for vibration energy harvesting / Lin Li [and others]
Study for steel ball surface quality detecting based on vision technique / Deli Liu [and others]
Design of maskless lithography system based on DMD / Jianping Ma, Xinrong Du, and Yantao Liu
Study about the thermal adaptability of mirrors based on MOEMS for satellite-borne laser beam control used in multiple targets tracing / Xiaofeng Li, Hua Zhang, and Yujun Yuan
A novel microscanning device / Yun-yi Zhou and Chang-cheng Yang
Study on bandwidth mutual benefit between the azimuth and pitch in an optoelectronic tracking system / Li-min Zhang, Juan Chen, and Jin Guo
An electromagnetically actuated fiber optic switch using magnetized ferromagnetic materials / Praveen Pandojirao-S [and others]
An optical scanner based on cantilever-type electrostatic zipping actuators / Smitha M.N. Rao [and others]
A fast initial alignment of MIMU in the two-dimension trajectory correction fuze for spinning projectile on stationary base / Qin Wang [and others]
Multi-path optical fiber sensor for atmospheric pressure / Shaorong Xiao, Jianhua Chang, and Fulai Ben.