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MEMS/MOEMS technologies and applications III : 12-14 November 2007, Beijing, China

Title
MEMS/MOEMS technologies and applications III : 12-14 November 2007, Beijing, China / Jung-Chih Chiao [and others], editors ; sponsored by SPIE [and] COS--Chinese Optical Society ; cooperating organizations, OSJ--Optical Society of Japan [and others].
ISBN
9780819470119
0819470112
Published
Bellingham, Wash. : SPIE, ©2008.
Physical Description
1 online resource (1 volume (various pagings)) : illustrations (some color)
Local Notes
Access is available to the Yale community.
Notes
Electronic reproduction. Bellingham, Wash. : SPIE, 2007. Mode of access: World Wide Web. Access restricted to SPIE Digital Library subscribers.
English.
Access and use
Access restricted by licensing agreement.
Variant and related titles
MOEMS technologies and applications III
SPIE digital library. OCLC KB.
Other formats
Also available in print.
MEMS/MOEMS technologies and applications III. Bellingham, Wash. : SPIE, ©2008
Format
Books / Online
Language
English
Added to Catalog
October 30, 2023
Bibliography
Includes bibliographical references and author index.
Contents
A review of different types of photonic MEMS tunable lasers / A.Q. Liu [and others]
Development of a 1x2 piezoelectric optical fiber switch / M. Leung [and others]
An active interconnecting mechanism for free-space optic applications / Ping Zhang [and others]
Experimental study on roughness and flatness of micromirror fabricated by different anisotropic silicon etching processes / Jing Xu [and others]
Optical MEMS devices based on micromachined torsion structure / Yaming Wu [and others]
Manufacturing and testing of the line-array fiber optic image slicer based on silicon V-grooves / Jingqiu Liang [and others]
Proposal and investigation for a planar MOEMS 1x8 wavelength-selective switch / Xiaoqi Li [and others]
High-speed and large-scale electromagnetically actuated MEMS scanning-mirror / Canjun Mu, Feiling Zhang, and Yaming Wu
Large distance liquid pumping by AC electro-osmosis for the delivery of biological cells and reagents in microfluidic devices / Daniel Lee [and others]
Rapid and simple half-quantitative measurement alpha-fetoprotein by poly(dimethylsiloxane) microfluidic chip immunochromatographic assay / Chao Tong, Qinghui Jin, and Jianlong Zhao
Amperometric immunosensor using electric field to improve the interaction between antibody and antigen / Jizhou Sun [and others]
MEMS-based uncooled infrared bolometer arrays: a review / Frank Niklaus, Christian Vieider, and Henrik Jakobsen
Contrastive study on the mechanical performance of MEMS microsprings fabricated by LIGA and UV-LIGA technology / Hua Li and Gengchen Shi
Calibration of computer vision positioning system for MEMS wire bonder / Junlan Li [and others]
A micro-electromechanical system design and manufacture considering fabrication error / Hua Li and Gengchen Shi
Investigation of charge accumulation in the dielectric for robust RF MEMS switches / Xuyuan Chen [and others]
New developments on polymer-based MEMS phase shifters / Jianqun Wang [and others]
Influence of ion implantation on dielectric charging in capacitive RF MEMS switches / Gang Li [and others]
Actuation voltage wave-form dependence of charge accumulation in RF MEMS switches / Haisheng San [and others]
Integrated microsensors and systems / Shanhong Xia [and others]
Research and fabrication of harmonic oscillator with high-quality in Si-based MOEMS acceleration seismic geophone / Zhengrong Tong [and others]
A silicon micromachined infrared emitter based on SOI waf / Haisheng San [and others]
A laser-induced fluorescence optical fiber detection system for micro-fluidic chip / Hong Wang and Yu Tang
Micro amperometric immunosensor by antibody immobilizing with electropolymerized protein A / Chao Bian [and others]
Optical fiber accelerometer based on MEMS torsional micromirror / Fanlin Zeng [and others]
A novel optical MEMS pressure sensor with a mesa diaphragm / Yixian Ge [and others]
Characterizations of microcantilever chemical sensors based on SOI material / Fangrong Hu [and others]
Study on the image processing algorithms for optical readout based uncooled MEMS IR imager systems / Li-quan Dong [and others]
Research of the digital coding mask based on digital micromirror device / Bai Lu [and others]
Fabrication of wall array by electrochemical etching of n-type silicon / Zhigang Zhao [and others]
Piezoelectric capacitive power generator from vibration energy / Yangjian Zhang [and others]
Charge accumulation in composite dielectric layers in capacitive RF MEMS switches / Linxian Zhan [and others]
MEMS for vibration energy harvesting / Lin Li [and others]
Study for steel ball surface quality detecting based on vision technique / Deli Liu [and others]
Design of maskless lithography system based on DMD / Jianping Ma, Xinrong Du, and Yantao Liu
Study about the thermal adaptability of mirrors based on MOEMS for satellite-borne laser beam control used in multiple targets tracing / Xiaofeng Li, Hua Zhang, and Yujun Yuan
A novel microscanning device / Yun-yi Zhou and Chang-cheng Yang
Study on bandwidth mutual benefit between the azimuth and pitch in an optoelectronic tracking system / Li-min Zhang, Juan Chen, and Jin Guo
An electromagnetically actuated fiber optic switch using magnetized ferromagnetic materials / Praveen Pandojirao-S [and others]
An optical scanner based on cantilever-type electrostatic zipping actuators / Smitha M.N. Rao [and others]
A fast initial alignment of MIMU in the two-dimension trajectory correction fuze for spinning projectile on stationary base / Qin Wang [and others]
Multi-path optical fiber sensor for atmospheric pressure / Shaorong Xiao, Jianhua Chang, and Fulai Ben.
Genre/Form
Conference papers and proceedings.
Citation

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