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Extreme Ultraviolet (EUV) Lithography VII : 22-25 February 2016, San Jose, California, United States
Title
Extreme Ultraviolet (EUV) Lithography VII : 22-25 February 2016, San Jose, California, United States / Eric M. Panning, Kenneth A. Goldberg, editors ; sponsored by SPIE, cosponsored by Sokudo Co., Ltd ; published by SPIE.
ISBN
9781510600119
1510600116
Publication
Bellingham, Washington : SPIE, [2016]
Copyright Notice Date
©2016
Physical Description
1 online resource
Local Notes
Access is available to the Yale community.
Notes
Title from PDF title page (SPIE digital library, viewed November 17, 2016).
Access and use
Access restricted by licensing agreement.
Variant and related titles
SPIE digital library. OCLC KB.
Format
Books / Online
Language
English
Added to Catalog
October 30, 2023
Series
Proceedings of SPIE, volume 9776
Bibliography
Includes bibliographical references.
Subjects
Genre/Form
Congress
proceedings (reports)
Conference papers and proceedings
Conference papers and proceedings.
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