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Optical scattering : measurement and analysis
Author
Title
Optical scattering : measurement and analysis / John C. Stover.
ISBN
9781615837397
1615837396
9780819419347
0819419346
9780819478443
081947844X
0819477761
9780819477767
Edition
2nd ed.
Published
Bellingham, Wash., USA : SPIE Optical Engineering Press, ©1995.
Physical Description
1 online resource (xiii, 321 pages) : illustrations
Local Notes
Access is available to the Yale community.
Access and use
Access restricted by licensing agreement.
Summary
As the authoritative resource on optical scattering, this book was developed from many years of teaching light-scatter measurement and analysis courses to optical engineers. Dr. Stover covers scattering beginning with its basics and covering surface roughness calculations, measurements, instrumentation, predictions, specifications, and industrial applications. Also included are appendices that review the basics of wave propagation and Kirchhoff diffraction. Whether you're an optical engineer currently investigating roughness-induced haze in the semiconductor industry, or just entering the field of scatter metrology, this text will be invaluable.
Variant and related titles
Knovel. OCLC KB.
Other formats
Print version: Stover, John C. Optical scattering. 2nd ed. Bellingham, Wash., USA : SPIE Optical Engineering Press, ©1995
Format
Books / Online
Language
English
Added to Catalog
February 14, 2024
Series
SPIE Press monograph ; PM24
Bibliography
Includes bibliographical references (pages 303-317) and index.
Contents
Chapter 1. Introduction to light scatter: 1.1 The scattering of light
1.2 Scatter from a smooth sinusoidal surface
1.3 Scatter from other surfaces
1.4 Scatter from windows and particulates
1.5 Bidirectional scatter distribution functions
1.6 Total integrated scatter
1.7 Summary.
Chapter 2. Surface roughness: 2.1 Profile characterization
2.2 The surface power spectral
Density and autocovariance functions
2.3 Summary.
Chapter 3. Scatter calculations and diffraction theory: 3.1. Overview
3.2. Kirchhoff diffraction theory
3.3. The Rayleigh approach
3.4. Comparison of vector and scalar results
3.5. Summary.
Chapter 4. Calculation of smooth-surface statistics from the BRDF: 4.1. Practical application of the Rayleigh-Rice perturbation theory
4.2. Roughness statistics of isotropic surfaces
4.3. Roughness statistics of one-dimensional surfaces
4.4. Roughness statistics for the general case
4.5. The K-correlation surface power spectrum models
4.6. The TIS derivation from the Rayleigh-Rice perturbation theory
4.7. Summary.
Chapter 5. Polarization of scattered light: 5.1. A review of polarization concepts
5.2. The polarization factor Q
5.3. Scattering vectors and matrices
5.4. Summary.
Chapter 6. Scatter measurements and instrumentation: 6.1. Scatterometer components
6.2. Instrument signature
6.3. Aperture effects on the measured BSDF
6.4. Signature reduction and near-specular measurements
6.5. The noise-equivalent BSDF
6.6. Measurement of P. and instrument calibration
6.7. Measurement of curved optics
6.8. Coordinate systems and out-of-plane measurements
6.9. Raster scans
6.10. Measurement of retroreflection
6.11. Alternate TIS devices
6.12. Error analysis of the measured BSDF
6.13. Summary.
Chapter 7. Scatter predictions: 7.1. Optical surfaces: using the Rayleigh-Rice equation
7.2. Rough surfaces
7.3. Partial data sets
7.4. Scatter from diffuse samples
7.5. BRDF standard surfaces
7.6. Software for prediction of scatter in optical systems
7.7. Summary.
Chapter 8. Detection of Discrete Surface and Subsurface Defects: 8.1. Polarization effects associated with defect scatter
8.2. Bulk defects in transparent optics
8.3. Near-point-scatter sources and differential-scattering cross section
8.4. Nontopographic defects in opaque materials
8.5. Summary.
Chapter 9. Industrial applications: 9.1 Semiconductor applications
9.2. Computer disks
9.3. Contamination measurement by wavelength discrimination
9.4. General manufacturing examples
9.5. Summary.
Chapter 10. Scatter specifications: 10.1 Generic specifications
10.2. Calculation of specifications for several examples
10.3. Summary
Appendix A. Review of electromagnetic wave propagation
A. 1 The wave equation
A.2 Electromagnetic plane waves in free space
A.3 Plane waves in a dielectric
A.4 Plane waves.in a conducting medium
Appendix B. Kirchhoff diffraction from sinusoidal gratings
Appendix C. BSDF data
Bibliography
Index.
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