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Advances in resist technology : March 12-13, 1984, Santa Clara, California
Title
Advances in resist technology : March 12-13, 1984, Santa Clara, California / C. Grant Willson, chairman/editor.
ISBN
0892525045
9780892525041
Published
Bellingham, Wash., USA : SPIE--the International Society for Optical Engineering, ©1984.
Physical Description
1 online resource (vi, 195 pages) : illustrations
Local Notes
Access is available to the Yale community.
Notes
Electronic reproduction. [Place of publication not identified] : HathiTrust Digital Library, 2011.
Access and use
Access restricted by licensing agreement.
Variant and related titles
SPIE digital library. OCLC KB.
Other formats
Print version: Advances in resist technology. Bellingham, Wash., USA : SPIE--the International Society for Optical Engineering, ©1984
Format
Books / Online
Language
English
Added to Catalog
February 14, 2024
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 469
Bibliography
Includes bibliographical references and index.
Subjects
Genre/Form
Conference papers and proceedings.
Also listed under
Society of Photo-optical Instrumentation Engineers.
Bookmark As
Citation
