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Reliability, testing, and characterization of MEMS/MOEMS II : 27-29 January 2003, San Jose, California, USA
Title
Reliability, testing, and characterization of MEMS/MOEMS II : 27-29 January 2003, San Jose, California, USA / Rajeshuni Ramesham, Danelle M. Tanner, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA).
ISBN
0819447803
9780819447807
Published
Bellingham, Wash., USA : SPIE, ©2003.
Physical Description
1 online resource (xliv, 334 pages) : illustrations (some color)
Local Notes
Access is available to the Yale community.
Notes
Electronic reproduction. Bellingham, Wash. : SPIE--the International Society for Optical Engineering, 2003. Mode of access: World Wide Web. Access restricted to SPIE Digital Library subscribers.
Access and use
Access restricted by licensing agreement.
Variant and related titles
SPIE digital library. OCLC KB.
Other formats
Also available in print.
Original
Format
Books / Online
Language
English
Added to Catalog
October 08, 2024
Series
SPIE proceedings series, v. 4980
Bibliography
Includes bibliographical references and index.
Subjects
Genre/Form
Conference papers and proceedings
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