Microsystems engineering : metrology and inspection / sponsored and published by SPIE--the International Society for Optical Engineering ; co-sponsored by EOS--European Optical Society, WLT--Wissenschaftliche Gesellschaft Lasertechnik e.V. (Germany).

Bellingham, Wash., USA : SPIE, c2001-

v. : ill. ; 28 cm.

Annual

[1] (20-21 June 2001)-

English

June 01, 2002

Includes bibliographical references and author index.